JPS6314150U - - Google Patents
Info
- Publication number
- JPS6314150U JPS6314150U JP10781086U JP10781086U JPS6314150U JP S6314150 U JPS6314150 U JP S6314150U JP 10781086 U JP10781086 U JP 10781086U JP 10781086 U JP10781086 U JP 10781086U JP S6314150 U JPS6314150 U JP S6314150U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- purge device
- air purge
- light
- electrical signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 238000010926 purge Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781086U JPS6314150U (en]) | 1986-07-14 | 1986-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10781086U JPS6314150U (en]) | 1986-07-14 | 1986-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314150U true JPS6314150U (en]) | 1988-01-29 |
Family
ID=30984431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10781086U Pending JPS6314150U (en]) | 1986-07-14 | 1986-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314150U (en]) |
-
1986
- 1986-07-14 JP JP10781086U patent/JPS6314150U/ja active Pending
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